Photolithography
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Photolithography (also termed "optical lithography" or "UV lithography") is a process used in microfabrication to selectively remove parts of a thin film or the bulk of a substrate. It uses light to transfer a geometric pattern from a photomask to a light-sensitive chemical "photoresist", or simply "resist," on the substrate. A series of chemical treatments then either engraves the exposure pattern into, or enables deposition of a new material in the desired pattern upon, the material underneath the photo resist. For example, in complex integrated circuits, a modern CMOS wafer will go through the photolithographic cycle up to 50 times.
- See also: Wikipedia
- Related: Nanoimprint lithography, Dip-pen nanolithography, Soft lithography, Magnetolithography, Nanochannel glass materials, Excimer lasers, Moore's law, Computational lithography, Stereolithography, Wafer foundry
| BYU Photolithography Resources BYU Photolithography Resources www.ee.byu.edu/cleanroom/lithography.phtml - Web |
| Semiconductor Lithography Semiconductor Lithography www.lithoguru.com/scientist/lithobasics.html - Web |
| Optical Lithography Introduction Optical Lithography Introduction www.research.ibm.com/journal/rd/411/chiu.html - Web |
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| Immersion Lithography Article Immersion Lithography Article sst.pennnet.com/.../Article_Display.cfm?Section=ARCHI&Subsection=Display&ARTICLE_ID=205024&p=28 - Web |
| Photolithography Equipment Photolithography Equipment www.imtecacculine.com - Web |
| Photo Etching Experts Photo Etching Experts microphoto.net - Web |
